Wafer-Scale ALD Synthesis of MoO<sub>3</sub> Sulfurized to MoS<sub>2</sub>
Silicon has dimensional limitations in following Moore’s law; thus, new 2D materials complementing Silicon are being researched. Molybdenum disulfide (MoS<sub>2</sub>) is a prospective material anticipated to bridge the gap to complement Silicon and enhance the performances of semiconductor devices...
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| Autores principales: | , , |
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| Formato: | Artigo |
| Lenguaje: | Inglês |
| Publicado: |
MDPI AG
2024-07-01
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| Colección: | Crystals |
| Materias: | |
| Acceso en línea: | https://www.mdpi.com/2073-4352/14/8/673 |
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