Wafer-Scale ALD Synthesis of MoO<sub>3</sub> Sulfurized to MoS<sub>2</sub>
Silicon has dimensional limitations in following Moore’s law; thus, new 2D materials complementing Silicon are being researched. Molybdenum disulfide (MoS<sub>2</sub>) is a prospective material anticipated to bridge the gap to complement Silicon and enhance the performances of semiconductor devices...
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| Egile Nagusiak: | , , |
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| Formatua: | Artigo |
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MDPI AG
2024-07-01
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| Saila: | Crystals |
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| Sarrera elektronikoa: | https://www.mdpi.com/2073-4352/14/8/673 |
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