Study on the Method of Charge Accumulation Suppression of Electrostatic Suspended Accelerometer

Electrostatic suspended accelerometers (ESAs) are widely used in high accuracy acceleration measurement. However, there exist accumulated charges on the isolated mass which damage the accuracy and the stability of ESAs. In this paper, we propose to apply actuation voltage with a combined waveform to...

ver descrição completa

Detalhes bibliográficos

Principais autores:	Jiefeng Dai, Wenrui Wang, Bin Wu, Lingyun Ye, Kaichen Song
Formato:	Artigo
Idioma:	Inglês
Publicado em:	MDPI AG 2022-06-01
coleção:	Sensors
Assuntos:	charge accumulation electrostatic suspended accelerometer charge noise combined waveform acceleration noise suppression
Acesso em linha:	https://www.mdpi.com/1424-8220/22/13/4930
Tags:	Adicionar Tag Sem tags, seja o primeiro a adicionar uma tag!