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Study on the Method of Charge Accumulation Suppression of Electrostatic Suspended Accelerometer

Electrostatic suspended accelerometers (ESAs) are widely used in high accuracy acceleration measurement. However, there exist accumulated charges on the isolated mass which damage the accuracy and the stability of ESAs. In this paper, we propose to apply actuation voltage with a combined waveform to...

Whakaahuatanga katoa

I tiakina i:
Ngā taipitopito rārangi puna kōrero
Ngā kaituhi matua: Jiefeng Dai, Wenrui Wang, Bin Wu, Lingyun Ye, Kaichen Song
Hōputu: Artigo
Reo:Inglês
I whakaputaina: MDPI AG 2022-06-01
Rangatū:Sensors
Ngā marau:
Urunga tuihono:https://www.mdpi.com/1424-8220/22/13/4930
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