Study on the Method of Charge Accumulation Suppression of Electrostatic Suspended Accelerometer
Electrostatic suspended accelerometers (ESAs) are widely used in high accuracy acceleration measurement. However, there exist accumulated charges on the isolated mass which damage the accuracy and the stability of ESAs. In this paper, we propose to apply actuation voltage with a combined waveform to...
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| Главные авторы: | , , , , |
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| Формат: | Artigo |
| Язык: | Inglês |
| Опубликовано: |
MDPI AG
2022-06-01
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| Серии: | Sensors |
| Предметы: | |
| Online-ссылка: | https://www.mdpi.com/1424-8220/22/13/4930 |
| Метки: |
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