Study on the Method of Charge Accumulation Suppression of Electrostatic Suspended Accelerometer

Electrostatic suspended accelerometers (ESAs) are widely used in high accuracy acceleration measurement. However, there exist accumulated charges on the isolated mass which damage the accuracy and the stability of ESAs. In this paper, we propose to apply actuation voltage with a combined waveform to...

Täydet tiedot

Bibliografiset tiedot

Päätekijät:	Jiefeng Dai, Wenrui Wang, Bin Wu, Lingyun Ye, Kaichen Song
Aineistotyyppi:	Artigo
Kieli:	Inglês
Julkaistu:	MDPI AG 2022-06-01
Sarja:	Sensors
Aiheet:	charge accumulation electrostatic suspended accelerometer charge noise combined waveform acceleration noise suppression
Linkit:	https://www.mdpi.com/1424-8220/22/13/4930
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