Investigations on Long-Range AFM Scans Using a Nanofabrication Machine (NFM-100)
The<b> </b>focus of this work lies on investigations on a new Nano Fabrication Machine (NFM-100) with a mounted atomic force microscope (AFM). This installed tip-based measuring system uses self-sensing and self-actuated microcantilevers, which can be used especially for field-emission scanning prob...
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| Principais autores: | , , , , , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI AG
2020-12-01
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| coleção: | Proceedings |
| Assuntos: | |
| Acesso em linha: | https://www.mdpi.com/2504-3900/56/1/34 |
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