Investigations on Long-Range AFM Scans Using a Nanofabrication Machine (NFM-100)

The<b> </b>focus of this work lies on investigations on a new Nano Fabrication Machine (NFM-100) with a mounted atomic force microscope (AFM). This installed tip-based measuring system uses self-sensing and self-actuated microcantilevers, which can be used especially for field-emission scanning prob...

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主要な著者:	Jaqueline Stauffenberg, Ingo Ortlepp, Christoph Reuter, Mathias Holz, Denis Dontsov, Christoph Schäffel, Steffen Strehle, Jens-Peter Zöllner, Ivo W. Rangelow, Eberhard Manske
フォーマット:	Artigo
言語:	Inglês
出版事項:	MDPI AG 2020-12-01
シリーズ:	Proceedings
主題:	nanopositioning nanometrology AFM self-sensing microcantilevers
オンライン･アクセス:	https://www.mdpi.com/2504-3900/56/1/34
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