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Ultrafine Aerosol Particle Sizer Based on Piezoresistive Microcantilever Resonators with Integrated Air-Flow Channel

To monitor airborne nano-sized particles (NPs), a single-chip differential mobility particle sizer (DMPS) based on resonant micro cantilevers in defined micro-fluidic channels (µFCs) is introduced. A size bin of the positive-charged fraction of particles herein is separated from the air stream by al...

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Principais autores: Maik Bertke, Ina Kirsch, Erik Uhde, Erwin Peiner
Format: Artigo
Sprog:Inglês
Udgivet: MDPI AG 2021-05-01
Serier:Sensors
Fag:
differential mobility particle sizer
micro electro mechanical system
micro-fluidic channel
piezoresistive micro cantilever
picogram balance
ultrafine particles
Online adgang:https://www.mdpi.com/1424-8220/21/11/3731
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