Ultrafine Aerosol Particle Sizer Based on Piezoresistive Microcantilever Resonators with Integrated Air-Flow Channel

To monitor airborne nano-sized particles (NPs), a single-chip differential mobility particle sizer (DMPS) based on resonant micro cantilevers in defined micro-fluidic channels (µFCs) is introduced. A size bin of the positive-charged fraction of particles herein is separated from the air stream by al...

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Autors principals:	Maik Bertke, Ina Kirsch, Erik Uhde, Erwin Peiner
Format:	Artigo
Idioma:	Inglês
Publicat:	MDPI AG 2021-05-01
Col·lecció:	Sensors
Matèries:	differential mobility particle sizer micro electro mechanical system micro-fluidic channel piezoresistive micro cantilever picogram balance ultrafine particles
Accés en línia:	https://www.mdpi.com/1424-8220/21/11/3731
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