Silicon Microcantilevers with ZnO Nanorods/Chitosan-SAMs Hybrids on Its Back Surface for Humidity Sensing

This paper reports a piezoresistive silicon microcantilever-based gravimetric humidity sensor, where a ZnO nanofilm (200 nm) and ZnO nanorods (NRs) with different lengths (1.5 µm and 6 µm) modified with chitosan self-assembled monolayers (SAMs) are coated on the microcantilevers’ bac...

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主要な著者:	Jiushuai Xu, Maik Bertke, Xuejing Li, Andi Setiono, Michael Fahrbach, Angelika Schmidt, Erwin Peiner
フォーマット:	Artigo
言語:	Inglês
出版事項:	MDPI AG 2018-12-01
シリーズ:	Proceedings
主題:	microcantilever ZnO nanorods Chitosan SAMs humidity sensing
オンライン･アクセス:	https://www.mdpi.com/2504-3900/2/13/838
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