Area-Selective Growth of Aligned ZnO Nanorod Arrays for MEMS Device Applications
ZnO nanorods (NRs) arrays with good vertical alignment were selectively grown on microscale patterned surfaces by a MEMS-compatible, low-temperature chemical-bath deposition method (CBD). The direct-current (DC) sputtered and subsequently annealed ZnO seed-layer was found to have a crucial effect on...
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| Huvudupphov: | , , , , , , |
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| Materialtyp: | Artigo |
| Språk: | Inglês |
| Utgiven: |
MDPI AG
2018-11-01
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| Serie: | Proceedings |
| Ämnen: | |
| Länkar: | https://www.mdpi.com/2504-3900/2/13/887 |
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