Dynamic Modeling, Simulation, and Experimental Verification of a Wafer Handling SCARA Robot With Decoupling Servo Control
In this paper, we propose a novel coordinated control method based on decoupling servo control to design a 4-DOF direct-drive SCARA robot for wafer handling purpose. As the basis of decoupling servo control, the dynamic model of the SCARA robot is obtained with two methods, the Newton-Euler equation...
Αποθηκεύτηκε σε:
| Κύριοι συγγραφείς: | , , , , , , , , |
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| Μορφή: | Artigo |
| Γλώσσα: | Inglês |
| Έκδοση: |
IEEE
2019-01-01
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| Σειρά: | IEEE Access |
| Θέματα: | |
| Διαθέσιμο Online: | https://ieeexplore.ieee.org/document/8682121/ |
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