क्यूआर कोड

Dynamic Modeling, Simulation, and Experimental Verification of a Wafer Handling SCARA Robot With Decoupling Servo Control

In this paper, we propose a novel coordinated control method based on decoupling servo control to design a 4-DOF direct-drive SCARA robot for wafer handling purpose. As the basis of decoupling servo control, the dynamic model of the SCARA robot is obtained with two methods, the Newton-Euler equation...

पूर्ण विवरण

में बचाया:
मुख्य लेखकों: Yunbo He, Xiquan Mai, Chengqiang Cui, Jian Gao, Zhijun Yang, Kai Zhang, Xun Chen, Yun Chen, Hui Tang
स्वरूप: Artigo
भाषा:Inglês
प्रकाशित: IEEE 2019-01-01
श्रृंखला:IEEE Access
विषय:
Decoupling control
direct-drive
wafer handling
SCARA robot
ऑनलाइन पहुंच:https://ieeexplore.ieee.org/document/8682121/
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