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Aluminum Nitride Out-of-Plane Piezoelectric MEMS Actuators

Integrating microelectromechanical systems (MEMS) actuators with low-loss suspended silicon nitride waveguides enables the precise alignment of these waveguides to other photonic integrated circuits (PICs). This requires both in-plane and out-of-plane actuators to ensure high-precision optical align...

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Principais autores: Almur A. S. Rabih, Mohammad Kazemi, Michaël Ménard, Frederic Nabki
Format: Artigo
Sprog:Inglês
Udgivet: MDPI AG 2023-03-01
Serier:Micromachines
Fag:
out-of-plane actuation
piezoelectric actuator
MEMS
residual stress
aluminum nitride
Online adgang:https://www.mdpi.com/2072-666X/14/3/700
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