Two-step hybrid process of movable part inside glass substrate using ultrafast laser
Abstract We demonstrate a two-step hybrid process for fabricating movable parts inside glass substrate using the selective laser-induced etching (SLE) process that is consisted of laser-direct writing and wet chemical etching. To obtain an influence by the optical characteristics of a glass substrat...
Gardado en:
| Principais autores: | , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
SpringerOpen
2021-12-01
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| Series: | Micro and Nano Systems Letters |
| Assuntos: | |
| Acceso en liña: | https://doi.org/10.1186/s40486-021-00142-3 |
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