Two-step hybrid process of movable part inside glass substrate using ultrafast laser
Abstract We demonstrate a two-step hybrid process for fabricating movable parts inside glass substrate using the selective laser-induced etching (SLE) process that is consisted of laser-direct writing and wet chemical etching. To obtain an influence by the optical characteristics of a glass substrat...
I tiakina i:
| Ngā kaituhi matua: | , , , , |
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| Hōputu: | Artigo |
| Reo: | Inglês |
| I whakaputaina: |
SpringerOpen
2021-12-01
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| Rangatū: | Micro and Nano Systems Letters |
| Ngā marau: | |
| Urunga tuihono: | https://doi.org/10.1186/s40486-021-00142-3 |
| Ngā Tūtohu: |
Kāore He Tūtohu, Me noho koe te mea tuatahi ki te tūtohu i tēnei pūkete!
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