Two-step hybrid process of movable part inside glass substrate using ultrafast laser
Abstract We demonstrate a two-step hybrid process for fabricating movable parts inside glass substrate using the selective laser-induced etching (SLE) process that is consisted of laser-direct writing and wet chemical etching. To obtain an influence by the optical characteristics of a glass substrat...
Na minha lista:
| Principais autores: | , , , , |
|---|---|
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
SpringerOpen
2021-12-01
|
| coleção: | Micro and Nano Systems Letters |
| Assuntos: | |
| Acesso em linha: | https://doi.org/10.1186/s40486-021-00142-3 |
| Tags: |
Sem tags, seja o primeiro a adicionar uma tag!
|