Pulsed Temperature Operation of SnO<sub>2</sub>-Based Gas Sensors
We herein demonstrate the pulsed-mode temperature operation of chemical sensor devices based on thin SnO<sub>2</sub> films, which were synthesized by magnetron sputtering. The gas-sensitive films were integrated on SiN-based micro-hotplate (µhp) chips, which enable operation temperatures up to 500 °...
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| Principais autores: | , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI AG
2024-05-01
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| coleção: | Proceedings |
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| Acesso em linha: | https://www.mdpi.com/2504-3900/97/1/211 |
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