Optimization of SnO<sub>2</sub>-Based CMOS-Integrated Gas Sensors by Mono-, Bi- and Trimetallic Nanoparticles
In this paper, we report on the optimization of SnO<sub>2</sub>-based thin film gas sensor devices by mono-, bi- and trimetallic nanoparticles. Ag, AgRu, and AgRuPd nanoparticles are sputter deposited on CMOS-integrated SnO<sub>2</sub>-thin film gas sensor devices. The CMOS device is a worldwide uni...
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| Hlavní autoři: | , , , , , |
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| Médium: | Artigo |
| Jazyk: | Inglês |
| Vydáno: |
MDPI AG
2021-01-01
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| Edice: | Proceedings |
| Témata: | |
| On-line přístup: | https://www.mdpi.com/2504-3900/56/1/43 |
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