Study on the Simulation and Experimental Impact of Substrate Holder Design on 3-Inch High-Quality Polycrystalline Diamond Thin Film Growth in a 2.45 GHz Resonant Cavity MPCVD

In this study, three different substrate holder shapes—trapezoidal, circular frustum, and adjustable cyclic—were designed and optimized to enhance the quality of polycrystalline diamond films grown using microwave plasma chemical vapor deposition (MPCVD). Simulation results indicate that altering th...

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מידע ביבליוגרפי

Principais autores:	Shuai Wu, Kesheng Guo, Jie Bai, Jiafeng Li, Jingming Zhu, Lei Liu, Lei Huang, Chuandong Zhang, Qiang Wang
פורמט:	Artigo
שפה:	Inglês
יצא לאור:	MDPI AG 2024-09-01
סדרה:	Crystals
נושאים:	2.45 GHz MPCVD polycrystalline diamond thin film design of substrate holder numerical simulation
גישה מקוונת:	https://www.mdpi.com/2073-4352/14/9/821
תגים:	הוספת תג אין תגיות, היה/י הראשונ/ה לתייג את הרשומה!