Capillary effect-based selective sealing strategy for increasing piezoelectric MEMS speaker performance
Abstract To address the serious acoustic performance deterioration induced by air leakage in the low-frequency range and the asynchronous vibration in electroacoustic transduction structures near the resonant frequency, a novel sealing strategy is proposed that targets one of the most widely reporte...
محفوظ في:
| المؤلفون الرئيسيون: | , , , |
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| التنسيق: | Artigo |
| اللغة: | Inglês |
| منشور في: |
Nature Publishing Group
2024-08-01
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| سلاسل: | Microsystems & Nanoengineering |
| الوصول للمادة أونلاين: | https://doi.org/10.1038/s41378-024-00753-x |
| الوسوم: |
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