Capillary effect-based selective sealing strategy for increasing piezoelectric MEMS speaker performance
Abstract To address the serious acoustic performance deterioration induced by air leakage in the low-frequency range and the asynchronous vibration in electroacoustic transduction structures near the resonant frequency, a novel sealing strategy is proposed that targets one of the most widely reporte...
שמור ב:
| Principais autores: | , , , |
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| פורמט: | Artigo |
| שפה: | Inglês |
| יצא לאור: |
Nature Publishing Group
2024-08-01
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| סדרה: | Microsystems & Nanoengineering |
| גישה מקוונת: | https://doi.org/10.1038/s41378-024-00753-x |
| תגים: |
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