A Fixed-End Beam–Cantilever Piezoelectric MEMS Speaker with Flexible Supporting Layer
Conventionally designed piezoelectric micro-electro-mechanical systems (MEMS) speakers with thin-film-type, piston-type, and cantilever-type vibration membranes still adopt a Si supporting layer, which not only hinders the improvement of sound pressure level (SPL) but also lacks characterization of...
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| Principais autores: | , , , , |
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| Format: | Artigo |
| Jezik: | Inglês |
| Izdano: |
MDPI AG
2026-02-01
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| Serija: | Micromachines |
| Teme: | |
| Online dostop: | https://www.mdpi.com/2072-666X/17/2/215 |
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