A Fixed-End Beam–Cantilever Piezoelectric MEMS Speaker with Flexible Supporting Layer
Conventionally designed piezoelectric micro-electro-mechanical systems (MEMS) speakers with thin-film-type, piston-type, and cantilever-type vibration membranes still adopt a Si supporting layer, which not only hinders the improvement of sound pressure level (SPL) but also lacks characterization of...
Na minha lista:
| Principais autores: | , , , , |
|---|---|
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI AG
2026-02-01
|
| coleção: | Micromachines |
| Assuntos: | |
| Acesso em linha: | https://www.mdpi.com/2072-666X/17/2/215 |
| Tags: |
Sem tags, seja o primeiro a adicionar uma tag!
|