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A backflow-suppressing piezoelectric MEMS cooler for thermal management within confined spaces

Rapid advances in compact electronic devices have led to severe thermal management challenges in inherently confined internal spaces, where pump characteristics are required for air coolers to maintain their cooling effectiveness. In the present work, for the first time, a silicon-based piezoelectri...

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Principais autores: Mingchao Sun, Menglun Zhang, Xinhao Wang, Shaobo Gong, Danyang Zheng, Bohua Liu, Xuejiao Chen, Wei Pang
Formato: Artigo
Idioma:Inglês
Publicado: AIP Publishing LLC 2026-07-01
Series:Nanotechnology and Precision Engineering
Acceso en liña:https://pubs.aip.org/tu/npe/article-pdf/doi/10.1063/5.0336201/21084171/043005_1_5.0336201.pdf
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