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Towards High Resolution Trimming of Silicon Photonic Waveguides

Methods for high resolution phase trimming of silicon Mach–Zehnder interferometers via the electrical annealing of amorphized waveguide sections are presented. A high resolution of phase change is necessary to accurately trim the performance of individual devices to correct fabrication errors and wh...

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Furkejuvvon:
Váldodahkkit: April M. Logan, Xia Chen, Xingshi Yu, Weihong Shen, Xingzhao Yan, Weiwei Zhang, Goran Z. Mashanovich, Graham T. Reed, David J. Thomson
Materiálatiipa: Artigo
Giella:Inglês
Almmustuhtton: Wiley-VCH 2026-02-01
Ráidu:Advanced Photonics Research
Fáttát:
ion implantation
phase tuning
programmable
silicon photonics
trimming
Liŋkkat:https://doi.org/10.1002/adpr.202500298
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