Towards High Resolution Trimming of Silicon Photonic Waveguides

Methods for high resolution phase trimming of silicon Mach–Zehnder interferometers via the electrical annealing of amorphized waveguide sections are presented. A high resolution of phase change is necessary to accurately trim the performance of individual devices to correct fabrication errors and wh...

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書誌詳細

主要な著者:	April M. Logan, Xia Chen, Xingshi Yu, Weihong Shen, Xingzhao Yan, Weiwei Zhang, Goran Z. Mashanovich, Graham T. Reed, David J. Thomson
フォーマット:	Artigo
言語:	Inglês
出版事項:	Wiley-VCH 2026-02-01
シリーズ:	Advanced Photonics Research
主題:	ion implantation phase tuning programmable silicon photonics trimming
オンライン･アクセス:	https://doi.org/10.1002/adpr.202500298
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