Towards High Resolution Trimming of Silicon Photonic Waveguides
Methods for high resolution phase trimming of silicon Mach–Zehnder interferometers via the electrical annealing of amorphized waveguide sections are presented. A high resolution of phase change is necessary to accurately trim the performance of individual devices to correct fabrication errors and wh...
Αποθηκεύτηκε σε:
| Κύριοι συγγραφείς: | , , , , , , , , |
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| Μορφή: | Artigo |
| Γλώσσα: | Inglês |
| Έκδοση: |
Wiley-VCH
2026-02-01
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| Σειρά: | Advanced Photonics Research |
| Θέματα: | |
| Διαθέσιμο Online: | https://doi.org/10.1002/adpr.202500298 |
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