Towards High Resolution Trimming of Silicon Photonic Waveguides

Methods for high resolution phase trimming of silicon Mach–Zehnder interferometers via the electrical annealing of amorphized waveguide sections are presented. A high resolution of phase change is necessary to accurately trim the performance of individual devices to correct fabrication errors and wh...

Descripció completa

Dades bibliogràfiques

Autors principals:	April M. Logan, Xia Chen, Xingshi Yu, Weihong Shen, Xingzhao Yan, Weiwei Zhang, Goran Z. Mashanovich, Graham T. Reed, David J. Thomson
Format:	Artigo
Idioma:	Inglês
Publicat:	Wiley-VCH 2026-02-01
Col·lecció:	Advanced Photonics Research
Matèries:	ion implantation phase tuning programmable silicon photonics trimming
Accés en línia:	https://doi.org/10.1002/adpr.202500298
Etiquetes:	Afegir etiqueta Sense etiquetes, Sigues el primer a etiquetar aquest registre!