High-Throughput Micro-Combinatorial TEM Phase Mapping of the DC Magnetron Sputtered Y<sub>x</sub>Ti<sub>1−x</sub>O<sub>y</sub> Thin Layer System
High-throughput methods are extremely important in today’s materials science, especially in the case of thin film characterization. The micro-combinatorial method enables the deposition and characterization of entire multicomponent thin film systems within a single sample. In this paper, we report t...
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| Principais autores: | , , , , |
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| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
MDPI AG
2024-05-01
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| Serier: | Nanomaterials |
| Fag: | |
| Online adgang: | https://www.mdpi.com/2079-4991/14/11/925 |
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