High-Throughput Micro-Combinatorial TEM Phase Mapping of the DC Magnetron Sputtered Y_xTi_1−xO_y Thin Layer System

High-throughput methods are extremely important in today’s materials science, especially in the case of thin film characterization. The micro-combinatorial method enables the deposition and characterization of entire multicomponent thin film systems within a single sample. In this paper, we report t...

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Hlavní autoři:	Dániel Olasz, Viktória Kis, Ildikó Cora, Miklós Németh, György Sáfrán
Médium:	Artigo
Jazyk:	Inglês
Vydáno:	MDPI AG 2024-05-01
Edice:	Nanomaterials
Témata:	Y-Ti-O thin films micro-combinatory pyrochlore structure TEM phase map reactive DC sputtering
On-line přístup:	https://www.mdpi.com/2079-4991/14/11/925
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