Using Mono-, Bi- and Tri-Metallic Nanoparticles to Improve Selectivity and Sensitivity of CMOS-Integrated SnO<sub>2</sub> Thin-Film Gas Sensors
We demonstrate the systematic optimization of SnO<sub>2</sub>-based thin-film chemical sensors by using mono-, bi- and tri metallic nanoparticles (NPs) composed of Ag, Pd, and Ru, which are deposited via magnetron sputtering inert gas condensation. The ultrathin SnO<sub>2</sub> films are integrated...
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| Autores principales: | , , , , , , |
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| Formato: | Artigo |
| Lenguaje: | Inglês |
| Publicado: |
MDPI AG
2024-06-01
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| Colección: | Proceedings |
| Materias: | |
| Acceso en línea: | https://www.mdpi.com/2504-3900/97/1/224 |
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