Reliability Evaluation Based on Mathematical Degradation Model for Vacuum Packaged MEMS Sensor
Vacuum packaging is used extensively in MEMS sensors for improving performance. However, the vacuum in the MEMS chamber gradually degenerates over time, which adversely affects the long-term performance of the MEMS sensor. A mathematical model for vacuum degradation is presented in this article for...
محفوظ في:
| المؤلفون الرئيسيون: | , , , , |
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| التنسيق: | Artigo |
| اللغة: | Inglês |
| منشور في: |
MDPI AG
2022-10-01
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| سلاسل: | Micromachines |
| الموضوعات: | |
| الوصول للمادة أونلاين: | https://www.mdpi.com/2072-666X/13/10/1713 |
| الوسوم: |
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