Aluminium surface modification by nitrogen-argon mixture PIII
Pure nitrogen, 30% argon/70% nitrogen, 50% argon/50% nitrogen, 70% argon/30% nitrogen plasma immersion ion implantation (PIII) processes onto aluminium samples has been performed at 2 to 6 kV negative bias and 50 to 150 ¿s pulse widths, the sample temperature being established at 400 °C. Incident fl...
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| Pubblicato in: | Superficies y vacío |
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| Autori principali: | , , , , , , , , |
| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C.
2009
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| Soggetti: | |
| Accesso online: | https://www.redalyc.org/articulo.oa?id=94216772003 |
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