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Numerical study of oxide thin film growth by using Nd:YAG laser beam
Based on a previous developed and published one-dimensional model for the growth of metallic oxide thinfilms, we have studied the tridimensional growth rates for titanium dioxide films grown on Ti layers. Thethermo-oxidation process of Ti films, deposited over glass substrates, is due to the film su...
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| Publicado no: | Superficies y vacío |
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| Main Authors: | , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C.
2003
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| Assuntos: | |
| Acesso em linha: | https://www.redalyc.org/articulo.oa?id=94216206 |
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