Interferometric thickness determination of thin metallic films
The deposition of thin metallic films on substrates is a common procedure, with a great number of different techniques, for a variety of practical and scientific applications. One of the most important properties to adjust is the thickness of the film. In special applications like MBE, this is made...
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| Publicado no: | Superficies y vacío |
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| Principais autores: | , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C.
1999
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| Assuntos: | |
| Acesso em linha: | https://www.redalyc.org/articulo.oa?id=94200974 |
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