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Interferometric thickness determination of thin metallic films

The deposition of thin metallic films on substrates is a common procedure, with a great number of different techniques, for a variety of practical and scientific applications. One of the most important properties to adjust is the thickness of the film. In special applications like MBE, this is made...

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Detalles Bibliográficos
Publicado en:Superficies y vacío
Main Authors: R. Hernández, A. Juárez, M. Hernández
Formato: Artigo
Idioma:Inglês
Publicado: Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C. 1999
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Acceso en liña:https://www.redalyc.org/articulo.oa?id=94200974
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