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On the thickness measurement of metallic thin films
Thickness is a key factor on the physical properties of the new miniaturized technology of thin film devices. Thinfilm physical properties depend on the thickness value and its control. This paper highlights the importance of theaccurate determination of the thickness in thin films. Many efforts hav...
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| Publicado no: | Ingeniería |
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| Main Authors: | , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Universidad Autónoma de Yucatán
2006
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| Assuntos: | |
| Acesso em linha: | https://www.redalyc.org/articulo.oa?id=46710206 |
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