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On the thickness measurement of metallic thin films
Thickness is a key factor on the physical properties of the new miniaturized technology of thin film devices. Thinfilm physical properties depend on the thickness value and its control. This paper highlights the importance of theaccurate determination of the thickness in thin films. Many efforts hav...
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| Publicado en: | Ingeniería |
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| Main Authors: | , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
Universidad Autónoma de Yucatán
2006
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| Assuntos: | |
| Acceso en liña: | https://www.redalyc.org/articulo.oa?id=46710206 |
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