X-ray reflectivity study of a W/Si multilayer grating

Multilayer gratings are artificially patterned multilyer thin films with the periodicities both in the lateral and normaldirections which renders them attracting for microelectronic and optical applications. A proper structural characterizationis of primary importance. To test the capability of the...

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Bibliografski detalji
Izdano u:Superficies y vacío
Glavni autori: P. Mikulík, I. Kostiè, P. Hudek, C. Falcony, L. Ortega, E. Majková, E. Pineík, Š. Luby, M. Jergel
Format: Artigo
Jezik:Inglês
Izdano: Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C. 2001
Teme:
Física, Astronomía y Matemáticas
Quantum wires
ray reflectivity
Multilayer grating
Lateral diffraction
Grating truncation rods
Online pristup:https://www.redalyc.org/articulo.oa?id=94201303
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