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Influences of nitridation and thermal annealing on GaN buffer layers and the property of subsequent GaN epilayers grown by MOCVD

GaN epilayers were grown on sapphire substrates by metalorganic chemical vapor deposition using the twostep method. The surface morphology of the GaN buffer layer grown under various pregrowth and postgrowthtreatments, such as nitridation duration, temperature-ramping rate and ambient during anneali...

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Veröffentlicht in:Superficies y vacío
Hauptverfasser: Dong Sing Wuu, Wei Hao Tseng, Wei Tsung Lin, Ray Hua Horng
Format: Artigo
Sprache:Inglês
Veröffentlicht: Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C. 1999
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Online Zugang:https://www.redalyc.org/articulo.oa?id=94200906
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