Effects of deposition parameters on the optical and microstructural characteristics of sputtered deposited nanocrystalline ZnO thin films

Nanocrystalline ZnO thin films were deposited on silicon and quartz substrates at different working pressures and different r.f. powers to study their structural and optical properties. The films were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM) and optical absorption...

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Bibliographische Detailangaben
Veröffentlicht in:Revista Mexicana de Física
Hauptverfasser: D. Cornejo Monroy, J. F. Sánchez-Ramírez, M. Herrera-Zaldívar, U. Pal
Format: Artigo
Sprache:Inglês
Veröffentlicht: Sociedad Mexicana de Física A.C. 2007
Schlagworte:
Física, Astronomía y Matemáticas
sputtering
ZnO thin films
microstructures
optical properties
Online Zugang:https://www.redalyc.org/articulo.oa?id=57028299005
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