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Effects of deposition parameters on the optical and microstructural characteristics of sputtered deposited nanocrystalline ZnO thin films
Nanocrystalline ZnO thin films were deposited on silicon and quartz substrates at different working pressures and different r.f. powers to study their structural and optical properties. The films were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM) and optical absorption...
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| Publicado no: | Revista Mexicana de Física |
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| Main Authors: | , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Sociedad Mexicana de Física A.C.
2007
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| Assuntos: | |
| Acesso em linha: | https://www.redalyc.org/articulo.oa?id=57028299005 |
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