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Structural and Optical Properties of Mg Doped ZnO Thin Films Deposited by DC Magnetron Sputtering

This paper reports the growth and characterization of transparent magnesium doped zinc oxide (ZnO:Mg) thin films prepared on glass substrates by dc magnetron sputtering. The effects of the Mg concentrations (0, 1 and 5 at %) and working gas compositions (pure Ar and Ar-O2 mixture) on the structural...

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Principais autores: A.Sh. Asvarov, S.Sh. Makhmudov, A.Kh. Abduev, A.K. Akhmedov, M.A. Aliev, B.A. Bilalov
Format: Artigo
Sprog:Inglês
Udgivet: Sumy State University 2016-11-01
Serier:Журнал нано- та електронної фізики
Fag:
ZnO
Mg thin film
Magnetron sputtering
Structural parameters
Transmittance
Band ga
Online adgang:http://jnep.sumdu.edu.ua/download/numbers/2016/4/articles/jnep_8_4(2)_04053.pdf
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