Structural and Optical Properties of Mg Doped ZnO Thin Films Deposited by DC Magnetron Sputtering
This paper reports the growth and characterization of transparent magnesium doped zinc oxide (ZnO:Mg) thin films prepared on glass substrates by dc magnetron sputtering. The effects of the Mg concentrations (0, 1 and 5 at %) and working gas compositions (pure Ar and Ar-O2 mixture) on the structural...
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| Hauptverfasser: | , , , , , |
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| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
Sumy State University
2016-11-01
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| Schriftenreihe: | Журнал нано- та електронної фізики |
| Schlagworte: | |
| Online-Zugang: | http://jnep.sumdu.edu.ua/download/numbers/2016/4/articles/jnep_8_4(2)_04053.pdf |
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