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Influence of high frequency and moderate energy pulses on DLC deposition onto metallic substrates by magnetron sputtering technique

The deposition of Diamond-like carbon (DLC) films brings excellent mechanical, chemical, optical and electronic properties to a large range of materials. However, a problem to be overcome is its poor adhesion on metallic substrates. Usually, a silicon layer must be deposited on the surface of metals...

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Publicat a:Brazilian Journal of Physics
Autors principals: R. M. Oliveira, L. Hoshida, M. Ueda, K. Baba
Format: Artigo
Idioma:Inglês
Publicat: Sociedade Brasileira de Física 2009
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Accés en línia:https://www.redalyc.org/articulo.oa?id=46413558017
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