Plasma-deposited a-C(N):H Films
The growth behaviour, film structure and mechanical properties of plasma-deposited amorphous hydrogenated carbon-nitrogen films are shortly reviewed. The effect of nitrogen-containing gas addition to the deposition to the hydrocarbon atmospheres used is discussed, considering the modifications obser...
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| Publicado en: | Brazilian Journal of Physics |
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| Autor Principal: | |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
Sociedade Brasileira de Física
2000
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| Assuntos: | |
| Acceso en liña: | https://www.redalyc.org/articulo.oa?id=46413500007 |
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