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Infrared Analysis of Thin Films: Amorphous, Hydrogenated Carbon on Silicon

The infrared analysis of thin films on a thick substrate is discussed using the example of plasma-deposited, amorphous, hydrogenated carbon layers (a-C:H) on silicon substrates. The framework for the optical analysis of thin films is presented. The main characteristic of thin film optics is the occu...

Cur síos iomlán

Sábháilte in:
Sonraí bibleagrafaíochta
Foilsithe in:Brazilian Journal of Physics
Príomhchruthaitheoirí: Wolfgang Jacob, Achim von Keudell, Thomas Schwarz-Selinger
Formáid: Artigo
Teanga:Inglês
Foilsithe / Cruthaithe: Sociedade Brasileira de Física 2000
Ábhair:
Rochtain ar líne:https://www.redalyc.org/articulo.oa?id=46413500006
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