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Mechanical and Magnetic Properties of Double Layered Nanostructures of Tin and Zirconium Oxides Grown by Atomic Layer Deposition
Double layered stacks of ZrO(2) and SnO(2) films, aiming at the synthesis of thin magnetic and elastic material layers, were grown by atomic layer deposition to thicknesses in the range of 20–25 nm at 300 °C from ZrCl(4), SnI(4), H(2)O, and O(3) as precursors. The as-deposited nanostructures consist...
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| 出版年: | Nanomaterials (Basel) |
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| 主要な著者: | , , , , , , |
| フォーマット: | Artigo |
| 言語: | Inglês |
| 出版事項: |
MDPI
2021
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| 主題: | |
| オンライン･アクセス: | https://ncbi.nlm.nih.gov/pmc/articles/PMC8307560/ https://ncbi.nlm.nih.gov/pubmed/34206394 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/nano11071633 |
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