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Growth and Crystallization of SiO(2)/GeO(2) Thin Films on Si(100) Substrates
The growth of [Formula: see text]-quartz-based piezoelectric thin films opens the door to higher-frequency electromechanical devices than those available through top-down approaches. We report on the growth of SiO [Formula: see text] /GeO [Formula: see text] thin films by pulsed laser deposition and...
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| Publicat a: | Nanomaterials (Basel) |
|---|---|
| Autors principals: | , , , , , , |
| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
MDPI
2021
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| Matèries: | |
| Accés en línia: | https://ncbi.nlm.nih.gov/pmc/articles/PMC8305750/ https://ncbi.nlm.nih.gov/pubmed/34201843 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/nano11071654 |
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